Dr. Yichen Liang
Lead Materials Scientist at Magic Leap Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985
KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11326, 1132615 (2020) https://doi.org/10.1117/12.2551684
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Lithography, Stochastic processes, Line width roughness, Extreme ultraviolet, Optical lithography, Photoresist developing

Proceedings Article | 23 March 2020 Presentation + Paper
Yichen Liang, Andrea Chacko, Samantha Oelklaus, Ethan Lowrey, Veerle Van Driessche, Ivan Sedlacek, Ming Luo, Stephen Grannemann, Douglas Guerrero
Proceedings Volume 11326, 1132614 (2020) https://doi.org/10.1117/12.2551671
KEYWORDS: Lithography, Silicon, Extreme ultraviolet lithography, Line width roughness, Polymers, Plasma etching, Photoresist materials

Proceedings Article | 13 March 2018 Presentation + Paper
Kui Xu, Eric Calderas, Mary Ann Hockey, Douglas Guerrero, Richard Daugherty, Yichen Liang
Proceedings Volume 10586, 105860W (2018) https://doi.org/10.1117/12.2297013
KEYWORDS: Directed self assembly, Annealing, Polymers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top