CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12498 > Article
Presentation
30 April 2023 Hybrid positive-tone resist synthesis via vapor phase infiltration for contact-hole patterning
Nikhil M. Tiwale, Ashwanth Subramanian, Won-Il Lee, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam
Author Affiliations +
Proceedings Volume 12498, Advances in Patterning Materials and Processes XL; 124981A (2023) https://doi.org/10.1117/12.2658659
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States
Abstract
Infiltration synthesis of vapor-phase precursors is ex-situ route of converting established polymeric resists into hybrids. The concept initially modelled over polymethylmethacrylate (PMMA)-AlOx hybrid has been expanded to infiltrating several metal oxide moieties into high sensitivity resist (HSR). Beyond implementing single metal oxide species, alloyed infiltration is explored as a means to limit pattern roughness originating from granular crystallites. Lithography performance of these new generation of hybrid positive tone resists is assessed towards contact-hole patterning.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Nikhil M. Tiwale, Ashwanth Subramanian, Won-Il Lee, Ming Lu, Aaron Stein, Jiyoung Kim, and Chang-Yong Nam "Hybrid positive-tone resist synthesis via vapor phase infiltration for contact-hole patterning", Proc. SPIE 12498, Advances in Patterning Materials and Processes XL, 124981A (30 April 2023); https://doi.org/10.1117/12.2658659
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Optical lithography
Metals
Oxides
Extreme ultraviolet
Extreme ultraviolet lithography
Lithography
Materials processing
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top