Performance prediction and measurement of silicon pore optics

Marcelo D. Ackermann; Maximilien J. Collon; Ramses Guenther; Rakesh Partapsing; Giuseppe Vacanti; Ernst-Jan Buis; Michael Krumrey; Peter Müller; Marco W. Beijersbergen; Marcos Bavdaz; Kotska Wallace

doi:10.1117/12.826840

31 August 2009 Performance prediction and measurement of silicon pore optics

Marcelo D. Ackermann, Maximilien J. Collon, Ramses Guenther, Rakesh Partapsing, Giuseppe Vacanti, Ernst-Jan Buis, Michael Krumrey, Peter Müller, Marco W. Beijersbergen, Marcos Bavdaz, Kotska Wallace

Author Affiliations +

Proceedings Volume 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV; 74371N (2009) https://doi.org/10.1117/12.826840
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

We present the latest results of X-ray metrology performed on Silicon Pore Optics, a novel type of lightweight X-ray optics made from silicon and developed for future, large area space based X-ray telescopes. From these so-called pencil beam measurements, performed at the PTB laboratory of the BESSY synchrotron radiation facility, the overall performance in terms of half energy width (HEW) of the optics has been calculated. All measurements are performed at an intrafocal distance, but due to the nature of this measurement method, the results in terms of HEW can be extrapolated to the focal plane. In the near future, upgrades of the X-ray facilities will allow measuring the performance of the optics in the actual focal plane. We also present the newest development of our X-ray tracer tool, which is used to retrieve performance and imaging prediction from single plate level up to a full optic by use of the mirror figure, as recorded during the fabrication process. We furthermore present results of AFM imaging and X-ray reflectivity measurements performed to determine the surface roughness of the base material (polished Si wafers) and of fully processed and coated mirror plates.

Citation Download Citation

Marcelo D. Ackermann, Maximilien J. Collon, Ramses Guenther, Rakesh Partapsing, Giuseppe Vacanti, Ernst-Jan Buis, Michael Krumrey, Peter Müller, Marco W. Beijersbergen, Marcos Bavdaz, and Kotska Wallace "Performance prediction and measurement of silicon pore optics", Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 74371N (31 August 2009); https://doi.org/10.1117/12.826840

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available