Dr. Marcelo D. Ackermann
Full Professor at Univ. Twente
SPIE Involvement:
Author
Publications (36)

Proceedings Article | 10 April 2024 Presentation + Paper
Atul Tiwari, Roberto Fallica, Marcelo Ackermann, Igor Makhotkin
Proceedings Volume 12955, 1295505 (2024) https://doi.org/10.1117/12.3010917
KEYWORDS: Photoacid generators, X-rays, Photoresist materials, Standing waves, Extreme ultraviolet lithography, Film thickness, Reflectivity, Fluorescence

Proceedings Article | 6 June 2023 Poster
Ilias Gaffarov, Jacobus Sturm, Ard Vlooswijk, Paul Heij, Marcelo Ackermann, Igor Makhotkin
Proceedings Volume 12578, 125780L (2023) https://doi.org/10.1117/12.2682704

Proceedings Article | 20 November 2017 Open Access Paper
Proceedings Volume 10564, 105640H (2017) https://doi.org/10.1117/12.2309138

SPIE Journal Paper | 25 April 2016 Open Access
JATIS, Vol. 2, Issue 02, 025001, (April 2016) https://doi.org/10.1117/12.10.1117/1.JATIS.2.2.025001
KEYWORDS: Diffraction gratings, Magnesium, X-rays, Diffraction, Silicon, Spectroscopy, Sensors, Point spread functions, Semiconducting wafers, Etching

SPIE Journal Paper | 22 December 2015 Open Access
JATIS, Vol. 1, Issue 04, 045004, (December 2015) https://doi.org/10.1117/12.10.1117/1.JATIS.1.4.045004
KEYWORDS: Spectrographs, Diffraction gratings, Silicon, Sensors, X-rays, Charge-coupled devices, Astronomical imaging, Telescopes, Diffraction, CCD image sensors

Showing 5 of 36 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top