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Angela Kravtsov
at Applied Materials Israel Ltd
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Publications (1)
Proceedings Article | 5 March 2021 Presentation
Advanced roughness characterization for 300mm Si photonics patterning and optimization
Proceedings Volume 11690, 116900K (2021) https://doi.org/10.1117/12.2578550
KEYWORDS: Silicon photonics, Silicon, Photonics, Optical lithography, Line edge roughness, Wafer-level optics, Metrology, Line width roughness, Semiconducting wafers
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