Dr. Benjamin Voelker Profile

Dr. Benjamin Voelker

Optical Designer at Carl Zeiss AG

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Publications (3)

Proceedings Article | 25 April 2008 Paper

Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Jan-Uwe Schmidt, Martin Friedrichs, Thor Bakke, Benjamin Voelker, Dirk Rudloff, Hubert Lakner

Proceedings Volume 6993, 69930D (2008) https://doi.org/10.1117/12.787015

KEYWORDS: Mirrors, Actuators, Silicon, Electrodes, Micromirrors, Adhesives, Spatial light modulators, Wafer bonding, Semiconducting wafers, Multilayers

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Proceedings Article | 23 January 2006 Paper

Large-scale drift-free monocrystalline silicon micromirror arrays made by wafer bonding

Thor Bakke, Benjamin Völker, Dirk Rudloff, Martin Friedrichs, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 611402 (2006) https://doi.org/10.1117/12.646182

KEYWORDS: Mirrors, Silicon, Semiconducting wafers, Wafer bonding, Electrodes, Micromirrors, Adhesives, Oxides, Etching, Metals

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Proceedings Article | 22 January 2005 Paper

Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding

Thor Bakke, Martin Friedrichs, Benjamin Voelker, Manfred Reiche, Lars Leonardsson, Harald Schenk, Hubert Lakner

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590567

KEYWORDS: Semiconducting wafers, Wafer bonding, Mirrors, Silicon, Adhesives, Electrodes, Polymers, Oxides, Micromirrors, Aluminum

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