Prof. Hubert Lakner Profile

Prof. Hubert Lakner

Director of Fraunhofer IPMS at Fraunhofer Institut fur Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (64)

Proceedings Article | 11 December 2012 Paper

Design of an affordable fluorescence confocal laser scanning microscope for medical diagnostics

Christin Bechtel, Jens Knobbe, Heinrich Grüger, Hubert Lakner

Proceedings Volume 8553, 85530O (2012) https://doi.org/10.1117/12.999937

KEYWORDS: Mirrors, Microscopes, Luminescence, Microelectromechanical systems, Confocal microscopy, Skin, Lens design, Objectives, Sensors, Laser scanners

Read Abstract +

Proceedings Article | 19 October 2012 Paper

Design of a confocal fluorescence microscope: space saving and affordable

Christin Bechtel, Jens Knobbe, Heinrich Grüger, Hubert Lakner, Fabian Reichert

Proceedings Volume 8487, 84870N (2012) https://doi.org/10.1117/12.929467

KEYWORDS: Luminescence, Mirrors, Microscopes, Confocal microscopy, Microelectromechanical systems, Laser scanners, Objectives, Monochromatic aberrations, Microscopy, Optical design

Read Abstract +

Proceedings Article | 13 October 2011 Paper

Confocal fluorescence microscope for clinical dermatologic applications

Christin Bechtel, Jens Knobbe, Heinrich Grüger, Hubert Lakner

Proceedings Volume 8167, 81670S (2011) https://doi.org/10.1117/12.896581

KEYWORDS: Skin, Luminescence, Mirrors, Microscopes, Objectives, Confocal microscopy, Microelectromechanical systems, Wound healing, Relays, Diffraction

Read Abstract +

Proceedings Article | 14 May 2010 Paper

Multispectral characterization of diffractive micromirror arrays

Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, Hubert Lakner

Proceedings Volume 7718, 77180Q (2010) https://doi.org/10.1117/12.854382

KEYWORDS: Mirrors, Micromirrors, Reflectivity, Diffraction, Imaging systems, Cameras, Homogenization, Deep ultraviolet, Laser sources, Spherical lenses

Read Abstract +

Proceedings Article | 19 May 2009 Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

Read Abstract +

Proceedings Article | 29 April 2009 Paper

Diffractive MEMS components, systems, and applications

Heinrich Grüger, Thomas Egloff, Tino Pügner, Michael Scholles, Harald Schenk, Hubert Lakner

Proceedings Volume 7319, 73190G (2009) https://doi.org/10.1117/12.818465

KEYWORDS: Microelectromechanical systems, Spectrometers, Spectroscopy, Sensors, Near infrared, Imaging systems, Signal processing, Imaging spectroscopy, Process control, Indium gallium arsenide

Read Abstract +

Proceedings Article | 24 February 2009 Paper

Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, H. Lakner

Proceedings Volume 7208, 72080A (2009) https://doi.org/10.1117/12.808210

KEYWORDS: Semiconducting wafers, Electrodes, Mirrors, Scalable video coding, Adhesives, Solids, Oxides, Silicon, Aluminum, Etching

Read Abstract +

Proceedings Article | 15 May 2008 Paper

High efficient pin orange organic light emitting diode fabrication with novel Al cathode using DC magnetron sputtering

Tae Hyun Gil, Sebastian Franke, Christian May, Jörg Amelung, Hubert Lakner, Karl Leo

Proceedings Volume 6999, 69991C (2008) https://doi.org/10.1117/12.780430

KEYWORDS: Organic light emitting diodes, Aluminum, Sputter deposition, Organic materials, Argon, Ytterbium, Particles, Molecules, Metals, Plasma

Read Abstract +

Proceedings Article | 25 April 2008 Paper

Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Jan-Uwe Schmidt, Martin Friedrichs, Thor Bakke, Benjamin Voelker, Dirk Rudloff, Hubert Lakner

Proceedings Volume 6993, 69930D (2008) https://doi.org/10.1117/12.787015

KEYWORDS: Mirrors, Actuators, Silicon, Electrodes, Micromirrors, Adhesives, Spatial light modulators, Wafer bonding, Semiconducting wafers, Multilayers

Read Abstract +

SPIE Journal Paper | 1 April 2008

Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors

Michael Scholles, Andreas Bräuer, Klaus Frommhagen, Christian Gerwig, Hubert Lakner, Harald Schenk, Markus Schwarzenberg

JM3, Vol. 7, Issue 02, 021001, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911643

KEYWORDS: Mirrors, Projection systems, Modulation, Video, Laser sources, Semiconductor lasers, LCDs, Image resolution, Microopto electromechanical systems, RGB color model

Read Abstract +

Proceedings Article | 8 February 2008 Paper

New approach for MEMS scanning mirror for laser projection systems

Heinrich Grüger, Jens Knobbe, Michael Scholles, Harald Schenk, Hubert Lakner

Proceedings Volume 6887, 68870L (2008) https://doi.org/10.1117/12.761531

KEYWORDS: Mirrors, Projection systems, Scanners, Microelectromechanical systems, Actuators, Modulation, Magnetism, CMOS technology, Teeth, Light sources

Read Abstract +

Proceedings Article | 8 February 2008 Paper

MEMS-based optoelectronic system for distance measurement applicable for panorama cameras

M. Schaulin, J. Knobbe, H. Neumann, K. Seidl, L. Kleinmann, U. Schelinski, M. Scholles, H.-J. Schönherr, H. Lakner

Proceedings Volume 6887, 68870A (2008) https://doi.org/10.1117/12.763166

KEYWORDS: Cameras, Laser scanners, Mirrors, LIDAR, Panoramic photography, Distance measurement, Imaging systems, Signal processing, Sensors, Data processing

Read Abstract +

Proceedings Article | 29 January 2008 Paper

Recent advancements in system design for miniaturized MEMS-based laser projectors

M. Scholles, K. Frommhagen, Ch. Gerwig, J. Knobbe, H. Lakner, D. Schlebusch, M. Schwarzenberg, U. Vogel

Proceedings Volume 6911, 69110U (2008) https://doi.org/10.1117/12.762679

KEYWORDS: Mirrors, Projection systems, Speckle, Micromirrors, Modulation, Modulation transfer functions, Diffusers, Electronics, Image resolution, Analog electronics

Read Abstract +

Proceedings Article | 2 October 2007 Paper

NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Thomas Egloff, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Michael Scholles, Hubert Lakner

Proceedings Volume 6765, 67650I (2007) https://doi.org/10.1117/12.734016

KEYWORDS: Hyperspectral imaging, Near infrared, Spectroscopy, Detector arrays, Mirrors, Imaging systems, Diffraction gratings, Microopto electromechanical systems, Imaging spectroscopy, Collimators

Read Abstract +

Proceedings Article | 14 February 2007 Paper

AO SLM demonstration system and test bed

Michael Wildenhain, Jens Knobbe, Andreas Gehner, Michael Wagner, Hubert Lakner

Proceedings Volume 6467, 64670E (2007) https://doi.org/10.1117/12.702338

KEYWORDS: Modulation transfer functions, Adaptive optics, Spatial light modulators, Wavefronts, Mirrors, Microelectromechanical systems, Monochromatic aberrations, Spatial frequencies, Imaging systems, Micromirrors

Read Abstract +

Proceedings Article | 9 February 2007 Paper

CMOS integrable micromirrors with highly improved drift-stability

Jan Schmidt, Jens Knobbe, Andreas Gehner, Hubert Lakner

Proceedings Volume 6467, 64670R (2007) https://doi.org/10.1117/12.707630

KEYWORDS: Mirrors, Actuators, Reflectivity, Aluminum, Silicon, Micromirrors, Electrodes, Analog electronics, Microelectromechanical systems, X-rays

Read Abstract +

Proceedings Article | 7 February 2007 Paper

Tilt compensated MOEMS projector as input device

Heinrich Grüger, Andreas Heberer, Christian Gerwig, Petra Nauber, Michael Scholles, Hubert Lakner

Proceedings Volume 6489, 64890D (2007) https://doi.org/10.1117/12.700183

KEYWORDS: Projection systems, Mirrors, Sensors, Microopto electromechanical systems, Gyroscopes, Projection devices, Silicon, Scanners, Semiconductor lasers, Laser sources

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

M. Scholles, A. Bräuer, K. Frommhagen, Ch. Gerwig, H. Lakner, H. Schenk, M. Schwarzenberg

Proceedings Volume 6466, 64660A (2007) https://doi.org/10.1117/12.700093

KEYWORDS: Mirrors, Projection systems, Micromirrors, Modulation, Semiconductor lasers, Image resolution, Laser sources, Video, RGB color model, Interfaces

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer

F. Zimmer, A. Heberer, Th. Sandner, H. Grueger, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6466, 646605 (2007) https://doi.org/10.1117/12.701821

KEYWORDS: Mirrors, Spectroscopy, Etching, Diffraction gratings, Diodes, Silicon, Control systems, Oxides, Scanning electron microscopy, Signal processing

Read Abstract +

Proceedings Article | 19 January 2007 Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proceedings Volume 6463, 64630J (2007) https://doi.org/10.1117/12.700331

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Oxides, Deep ultraviolet, Micromirrors, Actuators, Titanium, Silicon, Aluminum

Read Abstract +

Proceedings Article | 31 August 2006 Paper

Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

M. Scholles, A. Braüer, K. Frommhagen, Ch. Gerwig, B. Höfer, H. Lakner, H. Schenk, M. Schwarzenberg

Proceedings Volume 6288, 628807 (2006) https://doi.org/10.1117/12.680317

KEYWORDS: Mirrors, Micromirrors, Projection systems, Semiconductor lasers, Modulation, Image resolution, Video, Laser sources, Head, Fiber lasers

Read Abstract +

Proceedings Article | 21 April 2006 Paper

A large deflection translatory actuator for optical path length modulation

Christian Drabe, Thomas Klose, Harald Schenk, Alexander Wolter, Hubert Lakner

Proceedings Volume 6186, 618604 (2006) https://doi.org/10.1117/12.662853

KEYWORDS: Protactinium, Mirrors, Actuators, Modulation, Micromirrors, Silicon, 3D modeling, Crystals, Microelectromechanical systems, Michelson interferometers

Read Abstract +