Brian Cha
Senior Director, Advanced Technology Engagement
SPIE Involvement:
Conference Program Committee | Author
Publications (23)

Proceedings Article | 14 October 2011 Paper
Jihoon Na, Wonil Cho, Tae-Geun Kim, In-Yong Kang, Byungcheol Cha, Inkyun Shin, Han-Ku Cho
Proceedings Volume 8166, 81661H (2011) https://doi.org/10.1117/12.898896
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Extreme ultraviolet lithography, Modulation, Defect detection, Scanning electron microscopy, Scanners, Reflectivity, Wafer-level optics

Proceedings Article | 20 March 2010 Paper
Proceedings Volume 7636, 76361B (2010) https://doi.org/10.1117/12.847956
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet lithography, Defect inspection, Extreme ultraviolet, Critical dimension metrology, Visibility, Ion beams, Atomic force microscopy, Semiconducting wafers

Proceedings Article | 20 March 2010 Paper
Proceedings Volume 7636, 76360N (2010) https://doi.org/10.1117/12.847056
KEYWORDS: Particles, Extreme ultraviolet, Photomasks, Silica, Ruthenium, Scanning electron microscopy, Reflectivity, Scanning probe microscopy, Vacuum ultraviolet, Inspection

Proceedings Article | 27 May 2009 Paper
Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham, Matt House, Brian Cha, Henry Yun
Proceedings Volume 7470, 74700Z (2009) https://doi.org/10.1117/12.835197
KEYWORDS: Particles, Inspection, Extreme ultraviolet, Defect detection, Glasses, Surface finishing, Atomic force microscopy, Chemical mechanical planarization, Optical spheres, Quartz

Proceedings Article | 11 May 2009 Paper
Proceedings Volume 7379, 73790G (2009) https://doi.org/10.1117/12.824257
KEYWORDS: Photomasks, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Inspection, Lithography, Deposition processes, Defect inspection, Surface roughness, Manufacturing

Showing 5 of 23 publications
Conference Committee Involvement (5)
Photomask Technology 2024
30 September 2024 | Monterey, California, United States
Photomask Technology 2023
2 October 2023 | Monterey, California, United States
Photomask Technology
27 September 2021 | Online Only, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
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