Prof. Erol C. Harvey Profile

Prof. Erol C. Harvey

at Swinburne Univ of Technology

SPIE Involvement:

Author

Publications (54)

SPIE Journal Paper | 1 July 2007

Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers

Richard Barber, Muralidhar Ghantasala, Ralu Divan, Derrick Mancini, Erol Harvey

JM3, Vol. 6, Issue 03, 033006, (July 2007) https://doi.org/10.1117/12.10.1117/1.2778644

KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis

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SPIE Journal Paper | 1 January 2007

Effect of process parameters and packing density on dimensional errors for densely packed high-aspect-ratio SU-8 microstructures in x-ray lithography

Kaushal Vora, Bor-Yuan Shew, Erol Harvey, J. Hayes, Andrew Peele

JM3, Vol. 6, Issue 01, 013004, (January 2007) https://doi.org/10.1117/12.10.1117/1.2712869

KEYWORDS: Diffusion, Photomasks, X-rays, X-ray lithography, Lithography, Polymethylmethacrylate, Synchrotron radiation, Photoresist processing, Photoresist materials, Diffraction

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SPIE Journal Paper | 1 January 2007

Effect of process parameters and packing density on development times for densely packed high-aspect-ratio SU-8 microstructures in x-ray lithography

Kaushal Vora, Bor-Yuan Shew, Erol Harvey, J. Hayes, Andrew Peele

JM3, Vol. 6, Issue 01, 013003, (January 2007) https://doi.org/10.1117/12.10.1117/1.2712868

KEYWORDS: Acoustics, Diffusion, X-rays, Photomasks, X-ray lithography, Calibration, Temperature metrology, Resistance, Signal attenuation, Synchrotron radiation

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Proceedings Article | 19 January 2006 Paper

Thermal modeling of a microheater in a microchannel chip

Y. Zhu, A. Bui, H. Jin, S. Nahavandi, E. Harvey, I. Sutalo

Proceedings Volume 6036, 60361Y (2006) https://doi.org/10.1117/12.660972

KEYWORDS: Thermal modeling, Microfluidics, BioMEMS, Nanotechnology, Biological research, Biosensing, Sensing systems, Actuators, Biomedical optics, Nickel

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Proceedings Article | 13 January 2006 Paper

Hysteresis and drift in a carbon-polymer composite strain sensor

Rowan Cumming, Matthew Solomon, Jason Hayes, Erol Harvey, Alan Wilson

Proceedings Volume 6039, 60390H (2006) https://doi.org/10.1117/12.638481

KEYWORDS: Polymers, Metals, Resistance, Phase transfer function, Amplifiers, Data modeling, Sensors, Polymer thin films, Resistors, Composites

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Proceedings Article | 21 December 2005 Paper

Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography

K. D. Vora, B. Y. Shew, E. C. Harvey, J. P. Hayes, A. G. Peele

Proceedings Volume 6037, 603701 (2005) https://doi.org/10.1117/12.638457

KEYWORDS: X-rays, Photomasks, X-ray lithography, Diffusion, Lithography, Polymethylmethacrylate, Synchrotron radiation, Photoresist processing, Photoresist materials, Diffraction

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Proceedings Article | 23 February 2005 Paper

Fabrication of microstructures with different aspect ratios in a single layer

Yao Fu, Erol Harvey, Muralidhar Ghantasala

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.581894

KEYWORDS: Copper, Magnetism, Electroplating, Photoresist materials, Silicon, Electromagnetism, Semiconducting wafers, Resistance, Photomasks, Confocal microscopy

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Proceedings Article | 2 April 2004 Paper

Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers

Andrew Dowling, Muralidhar Ghantasala, E. Doyle, Erol Harvey

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.524048

KEYWORDS: Chromium, Tin, Etching, Silicon, Scanning electron microscopy, Optical lithography, Microelectromechanical systems, Photomasks, Bridges, Sensors

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Proceedings Article | 2 April 2004 Paper

An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures

Richard Barber, Muralidhar Ghantasala, Ralu Divan, Derrick Mancini, Erol Harvey

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.521170

KEYWORDS: Silicon, Radium, Lithography, X-ray lithography, Ultraviolet radiation, Polymethylmethacrylate, X-rays, Semiconducting wafers, Photoresist processing, Gold

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Proceedings Article | 2 April 2004 Paper

Design, modeling, and fabrication of piezoelectric polymer actuators

Yao Fu, Erol Harvey, Muralidhar Ghantasala, Geoff Spinks

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.527885

KEYWORDS: Ferroelectric polymers, Polymers, Nickel, Composites, Actuators, Electroplating, Polymeric actuators, Optical simulations, Micromachining, Microelectromechanical systems

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Proceedings Article | 2 April 2004 Paper

Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication

Erol Harvey, Jason Hayes

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.529651

KEYWORDS: Laser ablation, Excimer lasers, Polymers, Pulsed laser operation, Absorption, Plasma, Confocal microscopy, Microscopes, Excimers, Image processing

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Proceedings Article | 2 April 2004 Paper

Manufacturing microdroplet generators with Laser-LIGA technique

Joeska Husny, Hengyi Jin, Erol Harvey, Justin Cooper-White

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522744

KEYWORDS: Excimer lasers, Laser ablation, Microfluidics, Nickel, Fabrication, Copper, Polymers, Manufacturing, Interfaces, Liquids

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Proceedings Article | 2 April 2004 Paper

Development of surface connectors for microfluidic systems

Tony Liu, Syed Masood, Pio Iovenitti, Erol Harvey

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.525278

KEYWORDS: Connectors, Microfluidics, Polymers, Polymethylmethacrylate, Prototyping, Packaging, Finite element methods, Reliability, Liquids, Error control coding

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Proceedings Article | 30 March 2004 Paper

Semi-automatic calibration technique using six inertial frames of reference

Alan Lai, Daniel James, Jason Hayes, Erol Harvey

Proceedings Volume 5274, (2004) https://doi.org/10.1117/12.530199

KEYWORDS: Calibration, Sensors, Magnesium, Time metrology, Packaging, Microelectronics, Error control coding, Microtechnology, Kinematics, Chemical elements

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Proceedings Article | 29 March 2004 Paper

Fabrication, measurement, and modeling of electro-osmotic flow in micromachined polymer microchannels

Nihal Suriyage, Muralidhar Ghantasala, Pio Iovenitti, Erol Harvey

Proceedings Volume 5275, (2004) https://doi.org/10.1117/12.521576

KEYWORDS: Microfluidics, Polymers, Excimer lasers, Positron emission tomography, Glasses, Laser ablation, Liquids, Finite element methods, Solids, Visualization

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Proceedings Article | 23 December 2003 Paper

Microfabricated polymer filter device for bio-applications

Micah Atkin, Karl Poetter, Robert Cattrall, Erol Harvey

Proceedings Volume 5345, (2003) https://doi.org/10.1117/12.524321

KEYWORDS: Blood, Positron emission tomography, Microfluidics, Polymers, Ultraviolet radiation, Particles, Silica, Manufacturing, Excimer lasers, Optical filters

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Proceedings Article | 14 October 2003 Paper

Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Muralidhar Ghantasala, Richard Barber, Nicolai Moldovan, Derrick Mancini, Erol Harvey

Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514474

KEYWORDS: Excimer lasers, Polymethylmethacrylate, Microfluidics, Micromachining, Photomasks, Photoresist materials, Silicon, Polymers, Lithography, Ultraviolet radiation

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Proceedings Article | 17 January 2003 Paper

Passive mixing in microchannels by applying geometric variations

Hengzi Wang, Pio Iovenitti, Erol Harvey, Syed Masood

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.472888

KEYWORDS: Microfluidics, Particles, Diffusion, Convection, Fluid dynamics, Computational fluid dynamics, Laser Doppler velocimetry, Visualization, Microelectromechanical systems, Resistance

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Proceedings Article | 21 November 2002 Paper

Fabrication of x-ray spiral masks by laser ablation

Andrew Peele, Keith Nugent, Phillip McMahon, David Paterson, Chanh Tran, Adrian Mancuso, Tracy Mackin, Jason Hayes, Erol Harvey, Ian McNulty

Proceedings Volume 4783, (2002) https://doi.org/10.1117/12.451024

KEYWORDS: Spiral phase plates, X-rays, Laser ablation, Excimer lasers, X-ray optics, Phase shift keying, Phase modulation, Microfabrication, Optical vortices, Photomasks

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