Mr. John Tsai Profile

John Tsai

at Synopsys Inc

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Predictive printability assessment of EUV mask defects

Nicole Wu, Chun-Cheng Liao, Jirka Schatz, Thomas Muelders, Mariya Braylovska, John Tsai, Martin Bohn, Evgenii Sukhov, Wolfgang Demmerle

Proceedings Volume 13216, 1321611 (2024) https://doi.org/10.1117/12.3034491

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Contour extraction, Metrology, 3D mask effects, Printing, Lithography, Data modeling, Image processing, Calibration

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Proceedings Article | 23 March 2020 Paper

EUV OPC methodology for beyond 20nm memory cell by simulation data

Jiunhau Fu, Chiang Lin Shih, Chun Cheng Liao, Eric Huang, Elsley Tan, John Tsai, Ming Yun Chen, Yuan Pin Liao, Seung Hee Baek

Proceedings Volume 11323, 113232H (2020) https://doi.org/10.1117/12.2551669

KEYWORDS: Optical proximity correction, Extreme ultraviolet, Molybdenum, Photomasks, Data modeling, Critical dimension metrology, Source mask optimization, Semiconducting wafers, EUV optics, Array processing

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