Yuan Pin Liao
at Synopsys Taiwan Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12954, 1295419 (2024) https://doi.org/10.1117/12.3008958
KEYWORDS: Autoregressive models, Optical proximity correction, Performance modeling, Education and training, 3D modeling, Calibration, Neurons, Data modeling, Modeling, Overfitting

Proceedings Article | 23 March 2020 Paper
Jiunhau Fu, Chiang Lin Shih, Chun Cheng Liao, Eric Huang, Elsley Tan, John Tsai, Ming Yun Chen, Yuan Pin Liao, Seung Hee Baek
Proceedings Volume 11323, 113232H (2020) https://doi.org/10.1117/12.2551669
KEYWORDS: Optical proximity correction, Extreme ultraviolet, Molybdenum, Photomasks, Data modeling, Critical dimension metrology, Source mask optimization, Semiconducting wafers, EUV optics, Array processing

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