Naoki Momotori
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Houssam Chouaib, Teng Shi, Anderson Chou, Shinya Kawanami, Masatomo Takahara, Yeunchian Luo, Zhijie Leiyin, Bin Zeng, Derrick Shaughnessy, Zhengquan Tan, Kaori Sasaki, Naoki Momotori
Proceedings Volume 12955, 129553F (2024) https://doi.org/10.1117/12.3010992
KEYWORDS: Critical dimension metrology, 3D metrology, 3D modeling, Education and training, Scatterometry, Metrology, Machine learning, X-ray optics, X-rays, Semiconducting wafers

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