Mr. Orson Lin Profile

Orson Lin

at Toppan Chunghwa Electronics Co Ltd

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 20 October 2006 Paper

Study of chromeless mask quartz defect detection capability for 80-nm post structure

Jerry Lu, Boster Wang, Frank Chen, Orion Wang, Jomarch Chou, Orson Lin, Jackie Cheng, Ellison Chen, Paul Yu

Proceedings Volume 6349, 63493K (2006) https://doi.org/10.1117/12.685660

KEYWORDS: Inspection, Photomasks, Defect detection, Quartz, Semiconducting wafers, Reticles, Lithography, Chromium, Resolution enhancement technologies, Manufacturing

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Proceedings Article | 20 May 2006 Paper

Advanced hybrid mask process development

Orson Lin, Jomarch Chou, K. K. Fu, Booky Lee, Richard Lu, Jerry Lu, Chiang-Lin Shi

Proceedings Volume 6283, 62831S (2006) https://doi.org/10.1117/12.681754

KEYWORDS: Etching, Photomasks, Chromium, Resolution enhancement technologies, Neodymium, Quartz, Image processing, Diffractive optical elements, Phase shifts, Binary data

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Proceedings Article | 8 November 2005 Paper

Advanced e-beam CAR resist evaluation for 65nm generation

Gordon Chan, Orson Lin, Wesen Tseng, Booky Lee, Torey Huang, Makoto Kozuma

Proceedings Volume 5992, 59923B (2005) https://doi.org/10.1117/12.632052

KEYWORDS: Critical dimension metrology, Photomasks, Line edge roughness, Photoresist processing, Etching, Manufacturing, Edge roughness, Chemically amplified resists, Tin, Electronics

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Proceedings Article | 5 November 2005 Paper

Real-world impacts of inverse lithography technology

Jonathan Ho, Yan Wang, Xin Wu, Wolfgang Leitermann, Benjamin Lin, Ming Feng Shieh, Jie-wei Sun, Orson Lin, Jason Lin, Yong Liu, Linyong Pang

Proceedings Volume 5992, 59921Z (2005) https://doi.org/10.1117/12.632211

KEYWORDS: Photomasks, Optical proximity correction, Lithography, Manufacturing, Scanning electron microscopy, Calibration, Image quality, Semiconducting wafers, Semiconductors, Image segmentation

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Proceedings Article | 28 June 2005 Paper

Application of CPL mask for whole chip 65nm DRAM patterning

Orson Lin, Richard Hung, Booky Lee, Yuan-Hsun Wu, Makoto Kozuma, Chiang-Lin Shih, Jengping Lin, Michael Hsu, Stephen Hsu

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617230

KEYWORDS: Photomasks, Semiconducting wafers, Electron beam lithography, Manufacturing, Resolution enhancement technologies, Etching, Data modeling, Quartz, Chromium, Coating

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Proceedings Article | 27 January 2005 Paper

Improving the performance of E-beam 2nd writing in mask alignment accuracy and pattern faultless for CPL technology

Booky Lee, Richard Hung, Orson Lin, Yuan-Hsun Wu, Makoto Kozuma, Chiang-Lin Shih, Michael Hsu, Stephen Hsu

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.576542

KEYWORDS: Photomasks, Etching, Neodymium, Coating, Quartz, Chromium, Optical alignment, Scanning electron microscopy, Contamination, Image processing

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Showing 5 of 6 publications

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