CONFERENCE PROCEEDINGS
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Dr. Po-Sheng Wang
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Publications (4)
Proceedings Article | 22 November 2023 Poster
The process-footprint and density-dependent errors correction of laser mask pattern generator with software-based data path for cd uniformity improvement
Proceedings Volume PC12751, PC127510X (2023) https://doi.org/10.1117/12.2687188
KEYWORDS: Critical dimension metrology, Beam path, Error control coding, Photoresist materials, Integration, Etching, Design and modelling
Proceedings Article | 29 September 2023 Paper
Sidewall angle calculation on CD-SEM metrology
Proceedings Volume 12915, 129150O (2023) https://doi.org/10.1117/12.2685008
KEYWORDS: Transmission electron microscopy, Photomasks, 3D modeling, Metrology, 3D metrology, Scanning electron microscopy, 3D image processing, Industry, 3D mask effects, Semiconducting wafers
Proceedings Article | 16 September 2022 Paper
Enhancement of the proximity and aerial imaging performance of a software-based data path for raster-scanned multi-beam laser writer
Hsiang Jen Yang, Po Sheng Wang, Chun Chieh Han, Yi Min Lin, Wen Wei Lee, Wei Shen Chen
Proceedings Volume 12325, 123250T (2022) https://doi.org/10.1117/12.2640527
KEYWORDS: Photomasks, Raster graphics, Reticles
Proceedings Article | 16 September 2022 Poster + Paper
The application of mask data preparation on KLA DB inspection
Fei-Lin Liu, Po-Hsiang Yang, Liang-Chieh Lin, Po-Sheng Wang
Proceedings Volume 12325, 123250U (2022) https://doi.org/10.1117/12.2640662
KEYWORDS: Inspection, Calibration, Algorithm development, Reticles, Manufacturing, Optical simulations, Image transmission, Diffusion, Data conversion
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