Mr. Richard Barnett Profile

Richard Barnett

at Surface Technology Systems

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Author

Publications (2)

Proceedings Article | 29 December 2003 Paper

Developments in Si and SiO2 etching for MEMS-based optical applications

Lee Donohue, Janet Hopkins, Richard Barnett, Andrew Newton, Anthony Barker

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.524471

KEYWORDS: Etching, Silicon, Oxides, Reactive ion etching, Ions, Plasma, Switching, Dielectrics, Semiconducting wafers, Silica

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Proceedings Article | 15 January 2003 Paper

Performance enhancement and evaluation of deep dry etching on a production cluster platform

Mark McNie, Christopher Pickering, Alexandra Rickard, Iain Young, Janet Hopkins, Huma Ashraf, Serrita McAuley, Glenn Nicholls, Richard Barnett, Fred Roozeboom, Anton Kemmeren, Eric Van Den Heuvel, Jan Verhoeven, Colin Gormley, Paulo Schina, Corrado Di Luciano, Jyrki Kiihamaki

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478242

KEYWORDS: Etching, Semiconducting wafers, Dry etching, Silicon, Microsystems, Plasma, Microelectromechanical systems, Dielectrics, Oxides, Capacitors

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