Tomonori Okada
at Micron Memory Japan Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530S (2024) https://doi.org/10.1117/12.3008944
KEYWORDS: Speckle, Line width roughness, Semiconductors, Scanners, Lithography, Light sources, Chromatic aberrations

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552O (2024) https://doi.org/10.1117/12.3010278
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Reflection, Polarized light, Polarization, Image processing, Refractive index

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249611 (2023) https://doi.org/10.1117/12.2657873
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Diffraction, Error analysis, Signal intensity, Image processing, Etching, Photoresist processing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top