Dr. Zhen Yang Profile

Dr. Zhen Yang

at Tokyo Metropolitan Industrial Technology Research

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Publications (2)

Proceedings Article | 13 June 2006 Paper

Recent development of micropore optics using MEMS technologies

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Yoshitaka Ishisaki, Akio Hoshino, Zhen Yang, Takayuki Takano, Harutaka Mekaru, Ryutaro Maeda

Proceedings Volume 6266, 62661B (2006) https://doi.org/10.1117/12.670736

KEYWORDS: Silicon, Semiconducting wafers, Etching, Microelectromechanical systems, X-rays, X-ray optics, Wafer-level optics, Mirrors, Optics manufacturing, Oxides

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Proceedings Article | 13 November 2002 Paper

A world-to-chip socket for microfluidic prototype development

Zhen Yang, Ryutaro Maeda

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469433

KEYWORDS: Microfluidics, Packaging, Silicon, Prototyping, Microelectromechanical systems, Interfaces, Lead, Standards development, Glasses, Resistance

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