PROCEEDINGS VOLUME PC12055
SPIE ADVANCED LITHOGRAPHY + PATTERNING | 24 APRIL - 30 MAY 2022
Advances in Patterning Materials and Processes XXXIX
Editor Affiliations +
Proceedings Volume PC12055 is from: Logo
SPIE ADVANCED LITHOGRAPHY + PATTERNING
24 April - 30 May 2022
San Jose, California, United States
Hardware and Process Optimization
Jakub Koza, Caroline Evans, Runhui Huang, Jamie Storie, Vandana Krishnamurthy, Douglas Guerrero
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205501 https://doi.org/10.1117/12.2628988
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205502 https://doi.org/10.1117/12.2614668
Resist Metrology and Analytics
Maarten H. van Es, Mehmet Selman Tamer, Robbert Bloem, Elfi van Zeijl, Jacques C. J. Verdonck, Adam Chuang, Diederik J. Maas
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205504 https://doi.org/10.1117/12.2614293
Keynote Session
Michael D. Dickey
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205505 https://doi.org/10.1117/12.2615966
Ankit Vora, Nihar Mohanty, Keren Zhang, Giuseppe Calafiore, Tingling Rao, Heeyoon Lee, Geraud Dubois, Matthew E. Colburn
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205506 https://doi.org/10.1117/12.2622524
Underlayers
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205507 https://doi.org/10.1117/12.2609485
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC1205508 https://doi.org/10.1117/12.2612350
Resist I: Sequential Infiltration, Dry and Metal Resist
Mohammed Alvi, Richard Gottscho, Ali Haider, Seongjun Heo, PingYen Hsieh, Ching-Chung Huang, Gosia Jurczak, Benjamin Kam, Ji Yeon Kim, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC120550B https://doi.org/10.1117/12.2623499
Fluorochemicals in the Semiconductor Industry
Carla Ng, Yuexin Cao
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC120550I https://doi.org/10.1117/12.2613598
Poster Session
Nathalie Frolet, Emma Porcheron, Karine Jullian, Michael May, Yuji Tanaka, Masahiko Harumoto, Raluca Tiron
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC120550M https://doi.org/10.1117/12.2614242
Yoshiaki Yamada, Robb Fang, Jay Zhou, Nicole Wang
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC120550N https://doi.org/10.1117/12.2611689
Soichiro Okada, Keisuke Yoshida, Hiroyuki Fujii, Satoru Shimura
Proceedings Volume Advances in Patterning Materials and Processes XXXIX, PC120550O https://doi.org/10.1117/12.2614092
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