Angmar Li
at ASML
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 October 2019 Paper
Kun-yuan Chen, Andy Lan, Richer Yang, Vincent Chen, Shulu Wang, Stella Zhang, Xiangru Xu, Andy Yang, Sam Liu, Xiaolong Shi, Angmar Li, Stephen Hsu, Stanislas Baron, Gary Zhang, Rachit Gupta
Proceedings Volume 10961, 1096108 (2019) https://doi.org/10.1117/12.2524051

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10961, 109610O (2019) https://doi.org/10.1117/12.2515446
KEYWORDS: Computational lithography, Machine learning, Neural networks, Data modeling, Optical proximity correction, Lithography, Feature extraction, Convolution, Physics, Process modeling

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10961, 109610Z (2019) https://doi.org/10.1117/12.2532841
KEYWORDS: Optical proximity correction, Optical alignment, Semiconducting wafers, Optical lithography, Signal processing, Printing, Metrology, Overlay metrology

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